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一、引言 随着电子工业迅速发展,广大用户对我所生产的金属材料提出越来越多的真空性能要求,象金属材料的气密性、渗透性、放气速率、放气总量、吸气速率、吸气总量、比吸收和材料高温放气分析等。为了满足用户的需要,我所已建立了一系列检测金属材料真空性能的测试装置。为了适应检测金属材料放气总量的大量需要,在已经具备动态流量法测定材料放气量装置的基础上,又新建了快速静态定容法测定金属材料放气量装置。
I. INTRODUCTION With the rapid development of electronic industry, the majority of users put forward more and more vacuum performance requirements on the metal materials that I produce, such as the airtightness, permeability, deflation rate, total amount of deflation Gas velocity, total inspiratory volume, specific absorption, and high temperature outgassing of the material. In order to meet the needs of users, I have established a series of testing devices for testing the vacuum performance of metal materials. In order to meet the large amount of metal material required to deflate the total amount, with the dynamic flow method to determine the amount of material deflated device, based on the new fast static constant volume method for measuring the amount of deflated metal material device.