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采取不同基体性能的固结磨料抛光垫(FAP),在相同的化学机械抛光(CMP)参数下,研究了溶胀率和铅笔硬度等基体性能对K9光学玻璃加工时的材料去除率(MRR)和三维轮廓表面粗糙度(Sa)等加工性能的影响规律。结果表明,溶胀率和铅笔硬度两个基体性能指标共同影响着工件的MRR和表面粗糙度。随着基体溶胀率的增大,工件的MRR降低,而工件的表面粗糙度变大;随着湿态铅笔硬度的增加,工件的MRR也相应增大,而工件的表面粗糙度依据溶胀率的某一值呈现先增大后减小的趋势;同时亲水性FAP能对工件进行长时间持续稳定加工,可说明具有自修整功能。
Under the same chemical mechanical polishing (CMP) parameters, the matrix properties such as swelling rate and pencil hardness were used to study the material removal rate (MRR) and the wear resistance of K9 optical glass Three-dimensional profile of the surface roughness (Sa) and other processing properties of the law. The results show that both the matrix properties of the swelling rate and the pencil hardness affect the MRR and surface roughness of the workpiece. With the increase of the matrix swelling rate, the MRR of the workpiece decreases and the surface roughness of the workpiece becomes larger. As the wet pencil hardness increases, the MRR of the workpiece increases correspondingly, and the surface roughness of the workpiece changes according to the swelling ratio The value of a certain value increases firstly and then decreases. At the same time, the hydrophilic FAP can continuously and steadily process the workpiece for a long time, which shows the self-dressing function.