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本文介绍了用纯度为99.95%的镱作原料,采用真空蒸发、沉积方式制成的低应力传感器。用φ100 mm压缩气体炮为加载手段,在0~3.4G Pa压力范围内对镱应力传感器进行了标定。
This paper introduces the low stress sensor made of ytterbium with purity of 99.95% as raw material and vacuum evaporation and deposition. The φ100 mm compressed gas gun was used as the loading method, and the ytterbium stress sensor was calibrated in the pressure range of 0 ~ 3.4G Pa.