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从纳米计量与测试的总体概念出发,参考Teague等人的文章,综合国内外在这个领域的研究情况,并引用我们的科研成果,对纳米计量学与纳米计量测试技术发展现状及前景进行了讨论,讨论的问题包括:如何实现纳米尺度计量;建立纳米参考坐标系;产生纳米精度重复运动;纳米精度传感器与纳米坐标参考系建立联系;各种纳米精度测量技术的不确定性限制等。
Based on the general concept of nano-metrology and testing, reference is made to the article by Teague et al., And the research situation in this field at home and abroad is taken into account, and the research results of our research are referenced to discuss the development status and prospect of nanometer metrology and nano-metrology technology The topics discussed include: how to achieve nanoscale metrology; establishing a nanometer reference coordinate system; producing nanometer-precision repetitive motions; establishing relationships between nanometer-accuracy sensors and a nanocomposite reference system; and uncertainties in various nanometer-accuracy measurement techniques.