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通过主体材料ＺｎＯ掺入多种掺杂剂对Ｏ３气敏特性影响的研究，得到了对Ｏ３敏感的较佳材料，用该材料制作成的气敏传感器对Ｏ３具有较高的灵敏度、较低功耗和较好的响应恢复特性。
Through the main material ZnO doped with a variety of dopants on the O3 gas sensing properties of the study, O3-sensitive materials have been obtained with the material gas sensor made of O3 has a higher sensitivity, lower power Consumption and better response recovery features.