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采用镂空模板法制备了大面积周期孔状金属薄膜,实验揭示了金属小孔阵列在中红外波段的异常透过率增强现象。通过对周期孔状金属薄膜处于不同周围介质下得到的透射谱的研究发现,透射峰随着周围介质折射率的增大会有很明显的红移。比较周期孔状金属薄膜传感器非对称结构和对称结构的灵敏度发现,其对称结构下的灵敏度要高于非对称结构下的灵敏度。通过改变金属薄膜的一些参数,得到金属薄膜厚度和基底折射率为100 nm和1.3时灵敏度最大,分别为12 383 nm/RIU(refractive index unit)和12 667 nm/RIU;灵敏度随周期性孔径的增大而增大;孔的形状与圆的差别越大,灵敏度越高;灵敏度随孔中介质折射率的减小而增大。
Large-area periodic hole-shaped metal thin films were prepared by hollow-out template method. Experiments revealed the enhancement of the anomalous transmittance of metal pinhole arrays in the mid-infrared band. The study of the transmission spectra of periodic porous metal thin films with different surrounding media shows that the transmission peak has a significant redshift with the increase of the refractive index of the surrounding medium. Comparing the sensitivity of the asymmetric and symmetrical structures of the perforation metal thin film sensor, it is found that the sensitivity under the symmetrical structure is higher than that under the asymmetric structure. By changing some parameters of the metal thin film, the maximum sensitivity of the metal thin film and the refractive index of the substrate of 100 nm and 1.3 are 12 383 nm and RIU (refractive index unit) and 12 667 nm / RIU, respectively. The sensitivity changes with the periodic aperture Increases and increases; the greater the difference between the hole shape and the circle, the higher the sensitivity; the sensitivity increases with the decrease of the refractive index of the medium in the hole.