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近年来,随着大规模集成电路的发展,微波强磁场产生等离子体的方法已开始应用于微细加工技术领域。本文介绍微波等离子体刻蚀应用的实验结果。
In recent years, with the development of large-scale integrated circuits, the method of generating a plasma by a microwave strong magnetic field has been applied to the field of micro-fabrication technology. This article describes the experimental results of microwave plasma etching applications.