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本文报道了一种具有表面微机械结构的新型体声波复合谐振器。讨论了ＺｎＯ薄膜换能器的取向与体波模式机电耦合系数之间的关系；复合谐振器特性与器件参数的关系。给出了谐振器的制作工艺及测试结果。器件的尺寸为２５０μｍ×２５０μｍ，谐振频率在５５９．０５ＭＨｚ。
This paper reports a new type of bulk acoustic wave composite resonator with a surface micromechanical structure. The relationship between the orientation of the ZnO thin film transducer and the bulk wave mode electromechanical coupling coefficient is discussed. The relationship between the characteristics of the composite resonator and the device parameters is discussed. The fabrication process of the resonator and the test results are given. The device has a size of 250 μm × 250 μm and a resonant frequency of 559.05 MHz.