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低于１０－８帕量级的清洁真空，如果需要（如表面科学研究）并不难以获得。在大部分工业系统中，１０－５帕量级的有限压力足以满足。除在特殊的情况下，真空测量的重复性经常比绝对精度更为重要。此外，低压测量的绝对精度同其它物理量相比是相当低的．近年来已做了大量工作以完善真空计量（如新的校准系统，相互比对，真空规长期性能的研究，新的真空测量原理，如转子规的应用等）。一些有关热阴极离子规低限问题的新思想主要产生于有大型加速器的实验室。用四极质谱计作为分压测量能够产生较好的重复性；由于仅用电离原理，所以能更好地理解离子源对测量谱的影响。市场上的仪器常由微处理机控制（尤其是用于分压测量的仪器），非常适合于真空系统的自动化。
Clean vacuum below the order of 10-8 Pa is not difficult to obtain if needed (such as surface science studies). In most industrial systems, limited pressures in the order of 10-5 Pa are sufficient. Except in special cases, the repeatability of vacuum measurements is often more important than absolute accuracy. In addition, the absolute accuracy of LV measurements is quite low compared to other physical quantities. Much work has been done in recent years to improve vacuum gauging (eg, new calibration systems, comparison with each other, long-term performance of vacuum gauges, new vacuum gauging principles such as rotor gauge applications, etc.). Some of the new ideas related to the low limit of hot-cathode ionospheres have mainly come from laboratories with large accelerators. Quadrupole mass spectrometry as a partial pressure measurement can produce better repeatability; as the ionization principle alone, so you can better understand the ion source on the measurement spectrum. Instruments on the market are often controlled by microprocessors (especially for partial pressure measurement) and are well suited for the automation of vacuum systems.