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对大量实验测量出的甲烷浓度和衬底温度分别在单因素变化时，金刚石薄膜内应力的变化规律进行了归纳。在此基础上，利用材料科学中相图的思想，对任意给定的甲烷浓度和衬底温度条件下制备的金刚石膜中内应力处于张应力还是压应力的情况进行了分析，绘制出金刚石膜的“内应力状态图”。结果表明：利用“内应力状态图”可以预测内应力的张／压性质，预测分析结果与实验结果一致。
The variation of internal stress of diamond thin film under single factor variation was measured for a large number of experimental measurements of methane concentration and substrate temperature respectively. On the basis of the above, using the idea of phase diagram in material science, we analyzed the stress in the diamond film prepared under any given methane concentration and substrate temperature in the condition of tensile stress or compressive stress, and drawn the diamond film The “internal stress state diagram.” The results show that the “internal stress state diagram” can be used to predict the tension / pressure properties of internal stress. The predictive analysis results are consistent with the experimental results.