日本科学技术厅无机材枓研究所在用微波等离子体化学气相沉积法合成球形金刚石细粉末方面获得成功,微波等离子体化学气相沉积法是一种常用的生产金刚石薄膜的方法。甲烷浓度和基体温度不同于传统 Japan Institute of Science and Technology Institute of inorganic materials 在 by microwave plasma chemical vapor deposition synthesis of spherical diamond powder was successful, microwave plasma chemical vapor deposition method is a commonly used method of producing diamond films. Methane concentration and substrate temperature are different from the traditional