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为了提高寄生式时栅角位移传感器的精度,深入分析误差源产生机理和变化规律,确定其主次影响因素,通过对传感器结构分析和行波公式推导分析,得到寄生式时栅角位移传感器的主要误差来源,包括两相激励信号时间、空间正交性误差以及驻波信号幅值误差、线圈零点残余电压引起的误差等.对各误差分量的具体谐波频率次数进行理论推导,确定了产生不同谐波误差分量的具体原因,并通过实验进行验证.验证结果表明:导致传感器产生零点残余电压的误差影响因素对传感器测量精度的影响最为显著,为寄生式时栅传感器的主要误差来源;激励信号的时间、空间正交误差及两列驻波信号的幅值不等为次要来源.
In order to improve the accuracy of the parasitic grid-based angular displacement sensor, the generation mechanism and variation rule of the error source are deeply analyzed, and the primary and secondary influencing factors are determined. Through the analysis of the sensor structure and traveling wave formula, the parasitic graticule angle sensor The main sources of error, including the time of two-phase excitation signal, the spatial orthogonality error, the amplitude error of standing wave signal, the error caused by the residual voltage of the coil zero point, etc. The theoretical harmonic frequency of each error component is deduced theoretically, The results show that the main influencing factor of the sensor error is the error influencing factor of the zero residual voltage generated by the sensor, which is the main error source of the parasitic time-grating sensor. The excitation Signal time, space orthogonal errors and two columns of standing wave signal amplitude as the secondary source.