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本文介绍了RF溅射镀敷MoS_2润滑膜的特点、应用前景、成膜的基本原理及其制备工艺。并给出了这种膜在空气和真空条件下的滑动摩擦试验机上所测得的摩擦和耐磨性能结果及利用电子显微镜、电子衍射观察和分析膜的结构和表面形态,用俄歇电子谱仪(AES)对膜中的MpS_2和原料MoS_2的硫-钼比进行分析的结果。结果表明MoS_2溅射膜具有良好的润滑性能和一定的耐磨寿命,在这种膜中既含有“结晶型”结构的MoS_2,又含有非晶态的MoS_2,它的硫-钼比与原料MoS_2相比未发生明显的变化。
This paper introduces the characteristics, application prospect, basic principle of film forming and preparation process of MoS_2 lubricating film for RF sputtering. The results of friction and wear resistance of this film on a sliding friction tester under air and vacuum conditions were also given. The structure and surface morphology of the film were observed and analyzed by electron microscopy and electron diffraction. The Auger electron spectroscopy (AES) results of analyzing the sulfur-molybdenum ratio of MpS_2 in the membrane and the raw material MoS_2. The results show that the MoS 2 sputtering film has good lubricity and wear life. In this film, both the MoS 2 with “crystalline” structure and the amorphous MoS 2 with the molybdenum-sulfur ratio of MoS 2 Compared with no significant changes.