【摘 要】
：
一、概述本文描述为我所的电子束曝光机配套的图形发生器系统。它包括软件和硬件两个方面,其中硬件又可分为三个组成部分:接口电路、控制器和扫描系统,实物照片如图1所示。
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一、概述本文描述为我所的电子束曝光机配套的图形发生器系统。它包括软件和硬件两个方面,其中硬件又可分为三个组成部分:接口电路、控制器和扫描系统,实物照片如图1所示。
I. Overview This article describes the electron generator for my electron beam pattern generator system. It includes two aspects of software and hardware, of which the hardware can be divided into three components: interface circuit, controller and scanning system, physical photos shown in Figure 1.
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