一、前言 电子工业的发展正给整个工业体系带来革命性的变化。作为电子工业发展的主要代表是LSI和VLSI。它在小型化、轻量化、低耗能和高速化等方面的优越地位,都是任何其它器件所不可比拟的。为了适应LSI的发展,材料工作者曾作出了不少努力,其中一个方面就是发展大容量大直径硅单晶。这不仅可以提高单晶生产率,而且对提高器件生 I. INTRODUCTION The development of the electronics industry is bringing about revolutionary changes to the entire industrial system. As the main representative of the development of the electronics industry is LSI and VLSI. Its superiority in terms of miniaturization, light weight, low power consumption and high speed are unmatched by any other device. In order to adapt to the development of LSI, material workers have made a lot of efforts, one of which is the development of large-capacity large-diameter silicon single crystal. This not only improves single crystal productivity, but also increases device lifetime