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采用射频溅射方法在Ａｒ＋ Ｏ２ 气氛中制备了Ｃｄ２ＳｎＯ４（ＣＴＯ）透明导电薄膜，报道了在不同氧浓度和衬底温度下该膜的透射率、消光系数和折射率随波长变化的情况。研究发现：氧浓度越高，衬底温度越高，则薄膜透射率、折射率越大，而消光系数越低。对这些结果，从ＣＴＯ膜的晶格常数、氧空位等角度进行了理论分析。
Transparent conductive films of Cd2SnO4 (CTO) were prepared by RF sputtering in Ar + O2 atmosphere. The transmittance, extinction coefficient and refractive index of the films at different oxygen concentrations and substrate temperatures were reported. The results show that the higher the oxygen concentration is, the higher the substrate temperature is, the higher the transmittance and refractive index of the film are, while the lower the extinction coefficient is. These results are theoretically analyzed from the perspective of lattice constants and oxygen vacancies of CTO films.