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阐述了分裂频率约为100kHz的横向塞曼效应激光器及以其为光源的分辨率为10nm的动态式外差干涉仪。仪器应用了国产锁相环器件,采用了专门设计的前馈控制器,使其锁定范围从±15％扩展到±40％,满足了仪器的技术要求。仪器填补了国内高分辨位移动态测量仪的空白。
A transverse Zeeman effect laser with a splitting frequency of about 100 kHz and a dynamic heterodyne interferometer with a resolution of 10 nm are described. The instrument uses a domestic phase-locked loop device, using a specially designed feedforward controller to extend its lock range from ± 15% to ± 40%, meeting the technical requirements of the instrument. Instrument to fill the domestic high-resolution displacement dynamic measuring instrument blank.