介绍两种不同结构形式的基于电子隧道效应的ｎｍ级三维轮廓仪．其纵向分辨率可达００２ｎｍ，横向分辨率可达０２ｎｍ，扫描范围分别达到４０μｍ×４０μｍ和１４０μｍ×１４０μｍ．可直接对φ５０ｍｍ和φ１３０ｍｍ的大尺寸样品表面进行ｎｍ级的超微观形貌检测与分析．还给出了高定向石墨表现原子图像及一些超精密表面的超微观形貌测量的结果 Two kinds of three-dimensional profiler based on electron tunneling are introduced in two different structures. The vertical resolution of up to 0  02nm, horizontal resolution of up to 0  2nm, scanning range up to 40μm × 40μm and 140μm × 140μm. Directly on the φ50mm and φ130mm large-size sample surface nm-level micro-morphology detection and analysis. The results of the measurement of the ultra-micro topography of highly oriented graphite by atomic images and some ultra-precision surfaces are also given