前言半导体硅材料无论在电子、化工、冶金、机械、还是在空间技术及国防工业中都起着重要的作用。同时随着这种材料的广泛应用,对质量的要求也愈来愈高,而影响其质量的直接因素主要是材料的纯度,例如电活性元素Al、As、B、Ca、In、Sb的存在会影响它的电阻 Foreword Semiconductor silicon material plays an important role in the fields of electronics, chemical engineering, metallurgy, machinery, and space technology and defense industry. At the same time, with the wide application of this kind of material, the quality requirements are getting higher and higher, and the direct factors that affect the quality are mainly the purity of the materials, such as the existence of the electroactive elements Al, As, B, Ca, In and Sb Will affect its resistance