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本文采用正多面转镜方式,实现了高功率CO_2激光束均匀宽带扫描。扫描宽度从5～50mm连续可调;扫描频率达5×10~4每分钟;光强分布均匀。用矩阵光学分析了扫描机理,用电脑计算了若干参数曲线。研制了正八面体转镜和二十四面体镜系统。采用前聚焦和后聚焦fθ透镜在两种转镜上作了大量He—Ne、CO_2激光扫描试验。
In this paper, a positive polygon mirror is used to achieve a uniform wideband scanning of high power CO_2 laser beam. Scanning width of 5 ~ 50mm continuously adjustable; scanning frequency of 5 × 10 ~ 4 per minute; light intensity distribution. The mechanism of scanning was analyzed by matrix optics, and several parameter curves were calculated by computer. Developed the octahedron mirror and twenty-four surface mirror system. A large number of He-Ne and CO 2 laser scanning tests were performed on the two kinds of rotating mirrors with the front focus and the rear focus fθ lens.