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在深紫外光刻投影物镜的研制中,彗差和像散的补偿主要依靠光学元件的偏心调整机构。分析其工作原理及传动比特性:首先采用速度瞬心法推导传动比理论计算公式;然后建立偏心调整机构的运动学仿真模型,对输入/输出传动比进行模拟分析,并对光学元件沿X、Y向运动的位移特性进行分析;最后,分析机构沿X、Y向分别运动时正交方向的运动耦合误差。结果表明:通过理论计算和运动学仿真分析得到的传动比极其吻合;光学元件中心沿X、Y向的输出位移和驱动器输入位移均呈强线性关系;在驱动器输入位移为100μm时,光学元件沿X向的耦合误差为0.16%,沿Y向的耦合误差为0.497%;在驱动器输入位移为2 000μm时,光学元件X向的耦合误差增大到3.486%,沿Y向的耦合误差增大到9.888%;为后续研究提供了理论依据。
In the development of deep ultraviolet lithography projection objective, coma aberration and astigmatism compensation mainly rely on optical components eccentric adjustment mechanism. Analyze its working principle and transmission ratio characteristics: Firstly, the speed instantaneous center method is used to derive the theoretical formula of transmission ratio; then the kinematics simulation model of eccentric adjustment mechanism is established to simulate the input / output transmission ratio; Y movement to the displacement characteristics of the analysis; Finally, the analysis of institutions along the X, Y direction of movement respectively, the direction of the orthogonal motion coupling error. The results show that the transmission ratio obtained by theoretical calculation and kinematic simulation are in good agreement with each other. The output displacements in the X and Y directions along the optical axis are strongly linear with the input displacement of the actuator. When the input displacement of the actuator is 100μm, The coupling error in the X direction is 0.16% and the coupling error in the Y direction is 0.497%. When the input displacement of the driver is 2000 μm, the coupling error of the optical element in the X direction increases to 3.486%, and the coupling error in the Y direction increases to 9.888%; provided the theoretical basis for the follow-up study.