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设计并制作了一种全集成的基于波长路由的光真延时(OTTD)模块。该模块由两个相同的通道间隔为1.6nm的16×16阵列波导光栅路由器(AWGR)与一组波导延时线阵级联而成。测试结果表明该模块性能优异,工作波长通道间串扰小于-27dB,光纤端到端峰值波长的插入损耗约为12dB。采用矢量网络分析仪测试得到延时线阵提供的光延时步长为(6.24±0.4)ps。该模块中两个阵列波导光栅路由器及延时线阵均被集成在一块硅基片之上,并且都由二氧化硅(SiO_2)波导制作而成,整个器件尺寸为3.5cm×3.5cm。
A fully integrated wavelength-based optical delay-delay (OTTD) module is designed and fabricated. The module consists of two 16 × 16 arrayed AWGs with the same channel spacing of 1.6 nm and a set of waveguide delay line cascades. The test results show that the module has excellent performance. The crosstalk between working wavelength channels is less than -27dB, and the insertion loss of fiber end-to-end peak wavelength is about 12dB. The time delay of light delay provided by the vector network analyzer was (6.24 ± 0.4) ps. In this module, two arrayed waveguide grating routers and delay line arrays are integrated on a silicon substrate and both are made of silicon dioxide (SiO 2) waveguides with an overall device size of 3.5 cm × 3.5 cm.