1.前言目前,实用性的非接触位移计有静电电容式、涡流式、光波式和声波式。其中静电电容式非接触位移计可以用来测量导体和半导体。由于这利:测量不受导体或半导体固有性质和表面状态的影响,容易获得高精度效果,所以静电电容式非接触位移计应用相当广泛。在实际工作中,用它可以测量铁、铝和黄铜等金属, 1. Introduction At present, the practical non-contact displacement meter with capacitance, eddy current, light wave and sound wave. One capacitive non-contact displacement meter can be used to measure conductors and semiconductors. Because of this benefit: the measurement is not affected by the inherent properties of the conductor or the semiconductor and the surface condition, the high-precision effect is easily obtained, so the capacitive non-contact displacement meter is widely used. In actual work, it can be used to measure the metal such as iron, aluminum and brass,