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在ZnO、CdS等6mm点群的晶体中,垂直于C轴的面内的弹性和电性都是对称的,所以C轴择优取向的多晶薄膜即使其a轴随机取向也能具有象单晶那样的压电性,这类薄膜有很重要的实用价值,尤其是ZnO薄膜已广泛地用于各种声电和声光器件。 我们用射频平面磁控溅射装置和掺Li的ZnO陶瓷靶制出了压电性良好的ZnO膜,靶面附近的磁场水平分量约300高斯,膜的沉积速率约4微米/小时。
In a crystal of 6 mm point group such as ZnO and CdS, both in plane and in the plane perpendicular to the C-axis are symmetric in elasticity and electrical property. Therefore, the polycrystalline thin film having a C-axis preferred orientation can have a single crystal orientation Such piezoelectricity, such films have very important practical value, especially ZnO film has been widely used in a variety of acoustic and acousto-optic devices. We fabricated a ZnO film with good piezoelectricity by using a RF planar magnetron sputtering device and a Li-doped ZnO ceramic target. The horizontal component of the magnetic field near the target was about 300 Gauss, and the deposition rate of the film was about 4 μm / h.