半导体集成电路从60年代初期发展到现在,在速度、集成度和可靠性等方面均取得巨大进展。它是现代电子科学技术的重大成就,它对科学研究、工业、农业、国防建设和社会生活的各个方面都产生了深刻的影响,因此被科学家们誉为“金字塔上的明珠”。集成电路可分为双极型及MOS场效应型两种,前者特点为速度高,但工艺比较繁琐;后者工艺简单,便于高密度集成,但速度要低些。这两种形式各有特色,并驾齐驱,都 Semiconductor integrated circuits have evolved from the early 1960s to the present and made tremendous progress in terms of speed, integration and reliability. It is a major accomplishment of modern electronic science and technology. It has had a profound impact on all aspects of scientific research, industry, agriculture, national defense construction and social life and is therefore regarded by scientists as “the pearl of the pyramid.” Integrated circuits can be divided into two types of bipolar and MOS field effect, the former characterized by high speed, but more complicated process; the latter is simple, easy to integrate high-density, but slower. Both forms have their own characteristics, go hand in hand, all