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在平面型光学元件的表面真空蒸镀光学薄膜时,一般地是将待镀元件置于高真空室的载物盘上进行的。如果有特殊要求时(如蒸镀楔形膜),则将待镀元件倾斜地夹持在真空室内进行蒸镀。而对圆柱形光学零件或其他圆柱形物体表面蒸镀光学薄膜时,用上述方法就难以实现了。例如,欲在一个圆柱形物体外圆柱面蒸镀薄膜时,若采取使之与镀膜机工作台台面平行放置的方式,要进行三次蒸镀,尚不能保证膜层的均匀性,因为只有每次使它沿轴线翻转120°位置才能使整个外圆柱面都能蒸镀上光学薄膜。假如倾斜地将它夹持在真空室内时,则至少应蒸镀六次才能使膜层较均匀,因为要消除高、低差造成的不均匀结果,必须将圆柱体二端交换位置蒸镀。这样显然是复杂的,而且不
When the optical film is vacuum-evaporated on the surface of a planar optical element, it is common to place the member to be plated on a carrier plate of a high-vacuum chamber. If there are special requirements (such as the deposition of wedge film), then the member to be plated obliquely holding the vacuum chamber for evaporation. When the optical film is deposited on the surface of a cylindrical optical component or other cylindrical objects, it is difficult to realize the above method. For example, in order to evaporate the film on the cylindrical surface of a cylindrical object, if it is placed in parallel with the table of the coating machine, three times of deposition are required, the uniformity of the film can not be guaranteed yet, because only every time Make it flip along the axis of 120 ° position in order to make the entire outer cylindrical surface can be deposited on the optical film. If it is obliquely held in the vacuum chamber, then at least six evaporation should be in order to make the film more uniform, because to eliminate the high and low unevenness caused by uneven results, the two ends of the cylinder must be evaporated position. This is obviously complicated, and not