对光栅波导结构中的共振异常进行的研究表明,这种结构能给出非常窄的光谱共振带宽,在1.55μm范围内,满宽度半最大值处的光谱共振带宽只有0.12nm,这对于滤光片和调制应用非常理想。光栅波导结构的多层配置已被改变,一缓冲层把光栅层与波导层分开,该缓冲层同时被当作刻蚀过程的阻挡层。光栅层与 Studies on the resonance anomalies in a grating waveguide structure show that this structure gives a very narrow spectral resonance bandwidth of only 0.12 nm in the 1.55 μm range with a spectral resonance bandwidth of only 0.12 nm at the full width half maximum, Ideal for film and modulation applications. The multilayer configuration of the grating waveguide structure has been modified. A buffer layer separates the grating layer from the waveguide layer. The buffer layer is also used as a barrier to the etching process. Grating layer and