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本文提出一种双频激光三尺组合法直线度测量系统。理论分析及实验结果都说明本系统可望获得优于0.1μm/m的精度,是提高现有直线度测量精度的一个较实用的方法。
This paper presents a double-frequency laser three-foot combination method of straightness measurement system. Theoretical analysis and experimental results show that the system is expected to obtain better than 0.1μm / m accuracy, which is a more practical method to improve the accuracy of the existing straightness measurement.