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综述了飞秒激光对硅表面微构造的研究进展。阐述了超短脉冲诱导硅材料表面深亚波长结构的形成机理,讨论了飞秒激光作用硅表面制备微纳结构的影响因素和该微纳结构的发光特性,介绍了飞秒激光诱导硅材料表面微纳复合结构的生物仿生特性。揭示了飞秒激光在微结构制备方面的广泛应用前景。
The research progress of micro-structure of silicon surface by femtosecond laser is reviewed. The formation mechanism of deep subwavelength structure on silicon surface induced by ultrashort pulse is described. The influencing factors on the fabrication of micro / nano structure on the surface of silicon by femtosecond laser and the luminescent properties of the micro / nano structure are discussed. The effects of femtosecond laser on the surface of silicon material Biomimetic properties of micro / nano composite structure. The widely used prospect of femtosecond laser in the preparation of microstructures is revealed.