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本文利用一由两个相互垂直的加速度计组成的栅结构谐振器来同时测量x轴和y轴的加速度以及z轴的输入角速度.此谐振器利用变面积电容进行检测,具有良好的线性度及快速的信号响应.此谐振器的x轴及y轴的加速度计的谐振频率分别为1.931 5 kHz和1.840 3 kHz.在初始状态下,x轴的加速度计被驱动进入谐振状态,且y轴的加速度随着x轴的加速度计一起振动.当z轴存在角速度输入时,y轴的加速度计会相应地沿y轴进行振动,而x轴及y轴的加速度会改变相应轴上加速度计的平衡位置.测试结果表明,此器件的z轴角速度灵敏度为16 mV/((°)·s~(-1)),x和y轴的加速度灵敏度分别为49 mV/g和244 mV/g.z轴角速度输出的噪声等效角速度为0.013 8°/(?·(?)和y轴加速度输出的噪声等效加速度为0.42×10~(-3)g/(Hz)~(1/2)和0.074×10~(-3)g/(Hz)~(1/2).
In this paper, an accelerometer consisting of two mutually perpendicular accelerometers is used to measure the acceleration of the x-axis and y-axis and the input angular velocity of the z-axis at the same time. The resonator is tested with a variable area capacitor with good linearity and Fast signal response. The resonator’s x-axis and y-axis accelerometers have resonance frequencies of 1.931 5 kHz and 1.840 3 kHz, respectively. In the initial state, the x-axis accelerometer is driven into resonance and the y- Acceleration vibrates along with the x-axis accelerometer When the z-axis has angular velocity input, the y-axis accelerometer vibrates accordingly along the y-axis, while the x-axis and y-axis accelerations change the balance of the accelerometer on the corresponding axis The results show that the z-axis angular velocity sensitivity of the device is 16 mV / ((°) · s -1) and the acceleration sensitivities of the x and y axes are 49 mV / g and 244 mV / gz respectively The equivalent angular velocity of the output noise is 0.013 8 ° / (?) And the equivalent acceleration of the y-axis acceleration output is 0.42 × 10 -3 g / (Hz) -1/2 and 0.074 × 10 ~ (-3) g / (Hz) ~ (1/2).