主要针对机械零件表面微位移及热膨胀系数方面的研究,采用光学法布里-珀罗(F-P)腔进行精准的测量,光路实现容易,设计的系统性能可靠、测量精度较高和光学干涉系统误差较小,使用宽带光源或可调激光器发出的连续光谱进行测量,理论精度可达到纳米量级。该实时监测系统可用来进行物体表面微位移和未知材料的热膨胀系数的测量及精密机械加工中,解决了测试数据对应微位移非线性及偏转的实时监测问题,具有实际的应用价值。 Mainly for the surface micro-displacement of mechanical parts and thermal expansion coefficient of the research, the use of optical Fabry-Perot (FP) cavity for accurate measurements, easy to achieve the optical path, the design of the system performance, high accuracy and optical interference system error Smaller, measured using a continuous spectrum of broadband light sources or tunable lasers, theoretical accuracies can be on the nanometer scale. The real-time monitoring system can be used to measure the thermal expansion coefficient of micro-displacement of the object and the unknown material, and to process the precision machining. The real-time monitoring of the non-linearity and deflection of the micro-displacement of the test data is solved, which has practical application value.