论文部分内容阅读
用射频反应溅射法在Ar＋N2混和气氛中制备了软磁性Fe－Zr－N薄膜，考察了样品的微结构和磁性能，并讨论了微结构对磁性的影响。所制备的Fe-ZR-N膜都是（110）取向的，晶粒细小。发现Zr的添加能有效地抑制Fe4N相的生成，而添加Zr和掺氮均有利于形成细晶粒结构，并改善软磁性能。
The soft magnetic Fe-Zr-N thin films were prepared by radio frequency reactive sputtering in an Ar + N2 mixed atmosphere. The microstructure and magnetic properties of the films were investigated. The effects of the microstructures on the magnetic properties were also discussed. The prepared Fe-ZR-N films were oriented at (110) with fine grains. It is found that the addition of Zr can effectively inhibit the formation of Fe4N phase. Adding Zr and N-doping all contribute to the formation of fine-grained structure and improve the soft magnetic properties.