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针对工业用晶硅铸锭定向凝固炉建立二维非稳态全局传热模型和热应力计算模型。基于二维热应力计算结果,建立三维位错密度计算模型。对比分析了长晶过程中硅材料弹性系数模型对晶硅铸锭内部热应力分布及其大小的影响。研究表明,弹性系数模型的选取对于晶硅铸锭内热应力分布趋势影响不大,但对铸锭中心处以及靠近壁面处的热应力大小有显著影响。在长晶过程中,弹性系数可视为常数。弹性系数模型引起的热应力差异对位错密度模拟结果也会产生一定的影响。
A two-dimensional unsteady global heat transfer model and a thermal stress calculation model are established for industrial solidified silicon ingot directional solidification furnace. Based on the two-dimensional thermal stress calculation results, a three-dimensional dislocation density calculation model is established. The influence of silicon material elastic modulus model on the distribution of internal thermal stress and the size of silicon ingot during the process of grain growth was comparatively analyzed. The research shows that the selection of elastic coefficient model has little effect on the thermal stress distribution trend in the ingot, but has a significant effect on the thermal stress at the ingot center and near the wall. In the growth process, the elastic coefficient can be regarded as a constant. The difference of thermal stress caused by the elastic coefficient model will also have an impact on the simulation results of dislocation density.