【摘 要】
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The Mg acceptor activation mechanism and hole transport characteristics in AlGaN alloy with Mg doping concen-tration (~1020 cm-3) grown by metal-organic chemical
【机 构】
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Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engin
论文部分内容阅读
The Mg acceptor activation mechanism and hole transport characteristics in AlGaN alloy with Mg doping concen-tration (~1020 cm-3) grown by metal-organic chemical vapor deposition (MOCVD) are systematically studied throughoptical and electrical properties. Emission lines of shallow oxygen donors and (VIII complex)1-as well as V3N+and neu-tral Mg acceptors are observed, which indicate that self-compensation is occurred in Mg-doped AlGaN at highly doping levels. The fitting of the temperature-dependent Hall effect data shows that the acceptor activation energy values in Mg-doped Alx Ga1-x N (x=0.23, 0.35) are 172 meV and 242 meV, and the hole concentrations at room temperature are 1.2×1018 cm-3 and 3.3× 1017 cm-3, respectively. Therefore, it is believed that there exists the combined effect of the Coulomb potentials of the dopants and screening of the Coulomb potentials by a high hole concentration. Moreover, due to the high ionized acceptors’ concentration and compensation ratio, the impurity conduction becomes more prominent and the valence band mobility drops sharply at low temperature.
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