制备技术 应用真空设备,可制取聚硅氧烷薄膜。这种真空设备带有一个能控制硅氧烷蒸发源的电源和一个能改变温度的基片底座。利用锯齿波发生器达到控制和偏转电子束的目的。试验用的这种仪器装置,其加速电极的 Preparation technology Application of vacuum equipment, polysiloxane film can be obtained. The vacuum unit has a power supply that controls the source of the silicone evaporation and a substrate mount that changes temperature. The use of sawtooth generator to achieve the purpose of control and deflection electron beam. The test device used for this device, which accelerates the electrode