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化学沉积可得到均匀、致密的纳米晶薄膜,是一种较为理想的纳米晶制备方法。采用正交实验优化了化学沉积纳米晶钴磷合金的工艺配方,研究了正交实验5因素如硫酸钴、柠檬酸三钠、硼酸、次磷酸钠和温度及负载因子、沉积时间对沉积速度的影响。研究获得的优化工艺配方和参数为:0 06～0 12mol/LCoSO4·7H2O,0 40～0 55mol/LNaH2PO2·H2O,0 15～0 3mol/LNa3C6H5O7·2H2O,0 3～0 6mol/LH3BO3,50～80℃,负载因子0 4～0 8dm2/L。
Chemical deposition can be uniform, dense nanocrystalline thin film, is an ideal method for the preparation of nanocrystals. The orthogonal experiment was used to optimize the chemical formula of nanocrystalline cobalt-phosphorus alloy. The effects of orthogonal experiment 5 factors such as cobalt sulfate, trisodium citrate, boric acid, sodium hypophosphite, temperature and loading factor, deposition time on the deposition rate influences. The optimized process recipe and parameters obtained in the study are as follows: 0 06 ~ 0 12mol / LCoSO4 · 7H2O, 0 40 ~ 0 55mol / LNaH2PO2 · H2O, 0 15 ~ 0 3mol / LNa3C6H5O7 2H2O, 0 3 ~ 0 6mol / LH3BO3, 80 ℃, load factor 0 4 ~ 0 8dm2 / L.