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Al/Ni films were deposited on 128° Y-X LiNbO3 substrates by e-beam deposition. The influence of Ni under- layer on the microstructure, adhesion and resistivity of the Al/Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al/Ni films had a superior adhesion. Their resis- tivity decreased after annealing treatment at 200°C for 30 min. With the textured Al/Ni films, a 2.30 GHz-range im- age-impedance connection SAW (Surface Acoustic Wave) filter was successfully fabricated.
The influence of Ni under-layer on the microstructure, adhesion and resistivity of the Al / Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al / Ni films had a superior adhesion. Their resistivity decreased after annealing treatment at 200 ° C for 30 min. with textured Al / Ni films, a 2.30 GHz-range im - age-impedance connection SAW (Surface Acoustic Wave) filter was successfully fabricated.