圆片运动控制技术 如前所述,为了实现图3所示的圆片运动功能,基本的薄膜表面是以不同的结构来构成的。在执行这些功能中,正如下面所描述的那样,气膜是与其他已经研制出了的控制技术一块起作用的。 位置检测和信号发生 这项技术利用轴—径效应的特殊状态,来检测圆片在空气膜上运动到一个给定的位置。圆片的出现表现为压力的突然 Wafer Motion Control Technology As mentioned earlier, in order to realize the wafer movement function shown in FIG. 3, the basic film surface is configured in a different structure. In performing these functions, the gas film works in conjunction with other control technologies that have been developed, as described below. Position Detection and Signal Generation This technique utilizes the special state of the shaft-path effect to detect the movement of a wafer onto a film of air at a given location. The appearance of the disk appears as sudden pressure