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为了制备大规模集成电路工艺用高纯水,本文描述了我所高纯水制备过程中各部分的水质及控制指标。文章还介绍了用普通的光栅光谱仪、火焰原子吸收分光光度计及万能分光光度计等仪器检测高纯水水质的一系列方法。为了明确高纯水中Na含量对电路成品率的影响,文章给出了在工艺基本稳定的情况下Na含量与电路相对成品率的统计曲线和讨论。
In order to prepare high purity water for large scale integrated circuit (IC) process, this paper describes the water quality and control index of each part of our high purity water preparation process. The article also introduces a series of methods to detect the quality of high purity water with ordinary grating spectrometer, flame atomic absorption spectrophotometer and universal spectrophotometer. In order to clarify the effect of Na content in high purity water on the circuit yield, a statistical curve and discussion of Na content and circuit yield relative to the yield are given in the case of a basically stable process.