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采用磁控溅射技术在高速钢和单晶硅基体制备了不同碳含量的CrTiAlCN复合镀层,利用XRD、XPS、SEM分析了镀层的相结构、元素存在状态及截面显微形貌,通过销-盘式摩擦磨损试验机研究了镀层的摩擦系数。结果表明,镀层主要由CrN结构的化合物相组成;随着碳含量的增加,镀层中的sp2碳键含量增加,镀层逐渐开始非晶化,镀层更加致密。镀层的摩擦系数随碳含量的增加而下降,当碳含量为50.47 at%时,镀层摩擦系数降至0.1。
The CrTiAlCN composite coating with different carbon content was prepared by high-speed steel and single crystal silicon substrate by magnetron sputtering. The phase structure, elemental state and cross-sectional micro-morphology of the coating were analyzed by XRD, XPS and SEM. Disc friction and wear testing machine to study the friction coefficient of the coating. The results show that the coating is mainly composed of CrN structure compound phase. With the increase of carbon content, the content of sp2 carbon bond in the coating increases, the coating gradually begins to be amorphized and the coating is denser. The friction coefficient of the coating decreases with the increase of carbon content. When the carbon content is 50.47 at%, the friction coefficient of the coating decreases to 0.1.