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极高真空测量指的是低于10~(-9)帕范围内的压力测量。首先介绍了最有希望解决10~(-11)～10~(-13)帕测量难题的电离规的测量下限所受到的四个限制因素.在第二部分综述了极高真空的测量技术.先对迄今为止所研究的极高真空测量技术进行归纳和分类.然后重点介绍了对热阴极电离规的收集极的改进情况.热阴极电离规中.对收集极的研究是进行得最多.也最有成效的一个方面.分析了7种改进方法.最后介绍了阴极和阳极的改进情况.第三部分建立了极高真空测量坐标系.三个坐标轴分别表示离子收集极、阳极技术、阴极技术.每一项具体技术也是对应于坐标轴上的元素.并用数字待号来表示.利用这个坐标系可以对极高真空测量技术有一个全面的总体认识.从而方便地分析各种技术之间的联系.然后对如何应用这个坐标系进行了应用举例.文末列出了有关的参考文献20篇.
Very high vacuum measurement refers to the pressure measurement in the range of less than 10 ~ (-9) Pa. First of all, the four limiting factors to the lower limit of the ionization gauge that solves the 10 ~ (-11) ~ 10 ~ (-13) Pa measurement problems are introduced in the first part.In the second part, the measurement techniques of the very high vacuum are reviewed. First, summarize and categorize the ultra-high vacuum measurement techniques studied so far, and then highlight the improvements made to the collector of the hot cathode ionization gauge. In the hot cathode ionization gauge, the study of the collector is the most performed. One of the most effective aspects.An improved method is analyzed.At last, the improvements of the cathode and the anode are introduced.The third part sets up a very high vacuum measurement coordinate system.The three axes represent the ion collector, the anode technology, the cathode Technology. Each specific technique also corresponds to the elements on the axis and is represented by the number to be used. This coordinate system provides a comprehensive overview of very high vacuum measurement techniques, allowing easy analysis of the various techniques Then we give an example of how to apply this coordinate system.Finally, 20 related references are listed.