本文介绍了利用新型微位移驱动器、位移传感器、X—Y弹性工作台等组成的定心系统。该系统利用传感器测得的信号,通过模型处理可同时获得x、y两方向的偏移分量进行偏心调整。准确度分析和实验表明:在200×200μm的调整范围内,该系统驱动分辨力优于0.022μm,定心准确度优于0.05μm,定心稳定性优于0.015μm/10min This article describes the use of a new type of micro-displacement actuators, displacement sensors, X-Y flexible table consisting of centering system. The system uses the signal measured by the sensor, and can be obtained by model processing simultaneously offset component of x, y two directions for eccentric adjustment. Accuracy analysis and experiments show that the resolution of the system is better than 0.022μm, the centering accuracy is better than 0.05μm and the centering stability is better than 0.015μm / 10min in the adjustment range of 200 × 200μm