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提出一种用于激光(工作波长为1 064nm)防护的非逆反射双层闪耀光栅。以光栅方程、闪耀波长和闪耀角关系公式为基础,研究了双层闪耀光栅光线分布特性,分析了上下微结构闪耀角度关系;设计了双层闪耀光栅各特性参数,其上、下层光栅闪耀角分别为50°和6°,周期均为5.2μm,光学元件厚为0.5mm,在下表面镀Ag反射膜。采用反应离子刻蚀(RIE)技术制作双层闪耀光栅,通过轮廓仪进行测试。研究结果表明,双层闪耀光栅的光学特性受微结构形状误差影响较大,当光线垂直照射双层闪耀光栅时,出射光与入射光形成20°夹角,实现了激光非逆反射的目的。
A non-retroreflective double blazed grating for laser protection (operating wavelength of 1064nm) is proposed. Based on the grating equation, the relationship between the blaze wavelength and the blaze angle, the light distribution characteristics of double blazed gratings are studied and the relationship between the blaze angles of the upper and lower microstructures is analyzed. The parameters of double blazed gratings are designed. The blaze angle 50 ° and 6 °, respectively, with a period of 5.2 μm and an optical element thickness of 0.5 mm, respectively, and an Ag reflective film on the lower surface. Double-layer blazed gratings were fabricated by reactive ion etching (RIE) technique and tested by profilometer. The results show that the optical characteristics of the double blazed grating are greatly affected by the shape error of the microstructure. When the light is shone vertically on the double blazed grating, the outgoing light forms an angle of 20 ° with the incident light, which achieves the purpose of laser non-retroreflection.