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本文介绍一种新型压力传感器,它有别于压阻型和电容型压力传感器,利用固定玻璃板和对压力敏感的硅弹性膜之间的Fabry-Perot腔所产生的光线干涉原理制成。这种传感器可避免封装应力及热漂移对信号的影响,因而可在500～1000℃的高温下使用。
This article describes a new type of pressure sensor that is distinguished from piezoresistive and capacitive pressure transducers using the principle of light interference created by the Fabry-Perot cavity between a fixed glass plate and a pressure-sensitive silicon elastic membrane. This sensor can avoid the impact of package stress and thermal drift on the signal, which can be used at high temperatures of 500 ~ 1000 ℃.