在俄歇电子谱仪使用中,经常可观察到电子束在样品上留下的黑斑。研究证明,黑斑和表面的环境污染有关。黑斑产生的同时,碳峰峰位可发生多至约5电子伏的移动,而氧峰峰位则无可见的漂移,功函数增加约0.5电子伏之多,碳和氧的浓度未见明显变化。实验结果表明,碳峰作为能量定标的参考,可能导致误差。电子是各种表面科学研究手段中最广泛使用的探测粒子,它易于聚焦,偏转,并且不会在真空室中积累而导致真空度的破坏。但是,电子束对被研究样品的表面的影响也越来越为 In Auger electron spectroscopy, the dark spots that the electron beam leaves on the sample are often observed. Studies have shown that dark spots and the surface of the environment pollution. At the same time, the peak of carbon peak can occur up to about 5 electron volts while the peak of oxygen peak has no visible drift. The work function increases by about 0.5 electron volts and the concentration of carbon and oxygen is not obvious Variety. Experimental results show that the carbon peak as a reference for energy calibration may lead to errors. Electrons are the most widely used detection particles in various surface science research methods. They are easy to focus and deflect, and do not accumulate in the vacuum chamber and cause damage to the vacuum. However, the effect of the electron beam on the surface of the investigated sample is also getting more and more