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介绍了Y6 0A型单晶炉电气控制系统设计思路及工作原理 ,试验数据表明其提拉速度精度、控温精度、控温均匀度等技术指标的先进性。
The design principle and working principle of the Y6 0A single crystal furnace electrical control system are introduced. The experimental data show that the pulling speed accuracy, temperature control accuracy, temperature uniformity and other technical indicators advanced.