一、引言 超声聚焦探头作为超声断面图象系统中不可缺少的部份,愈来愈显示出它的重要性。自六十年代后半期开始,国外对单晶片聚焦探头进行了广泛的研究,而对于多晶片探头到七十年代才开始受到人们的重视。性能良好的多晶片聚焦探头1976年左右才被研制出来[1][2],而带有阻抗匹配 I. INTRODUCTION Ultrasound focusing probe as an indispensable part of the ultrasonic cross-sectional image system shows its importance more and more. Since the second half of the 1960s, extensive research has been conducted on single-chip focused probes abroad, but only for the multi-wafer probes until the 1970s. A well-performing multi-chip focus probe was developed around 1976 [1] [2], with impedance matching