当具有一定动能的电子轰击固体表面时,将产生一系列复杂的物理过程。每一过程都相应地产生能表征固体内部某些性质的信息或效应,如背散射电子、二次电子、俄歇电子……。它们是各类电子束显微分析手段的物理基础。入射电子在固体中将受到原子的散射。这类散射,有的为弹性散射;有的为非弹性散射。入射电子中某个电子它可能刚入射到固体表面就被大角度的弹性散射折回到固体的外部,也可能进入固体后损失一部分能量将晶格中的电子激发到较高的能级,在其继 When a certain kinetic energy of the electron bombardment of the solid surface, it will produce a series of complex physical processes. Each process accordingly generates information or effects that characterize some of the properties inside the solid, such as backscattered electrons, secondary electrons, Auger electrons. They are the physical basis for all types of electron beam microscopy. The incident electrons will be scattered by the atoms in the solid. This type of scattering, some for elastic scattering; some non-elastic scattering. It is possible that an electron in an incident electron may be incident upon a solid surface by a large angle of elastic scattering back to the outside of the solid or it may enter the solid and then lose some of the energy to excite the electrons in the lattice to a higher energy level. Following