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Ｔｉ/ＴｉＮ纳米薄摸界面结构对其摩擦学性能的影响———ＳａｎｔＣ .Ｓｕｒｆａｃｅ＆ＣｏａｔｉｎｇｓＴｅｃｈｎｏｌｏｇｙ ,2 0 0 0 ,12 7(2～ 3) :16 7(英文 )用ＲＦ反应溅射方法在Ｓｉ〈10 0 7〉基材上沉积膜厚为2 0 .2～ 2 .5ｎｍＴｉ/ＴｉＮ纳米薄摸 ,研究了二种界面
Effect of Interface Structure on Tribological Properties of Ti / TiN Nanostructured Interface - “SantC. Surface & Coatings Technology”, 2000, 12 (2): 16 7 0 7> deposited on the substrate film thickness of 20.2 ~ 2.5nmTi / TiN nano-thin touch, two kinds of interface