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应用光的干涉和衍射理论，系统地阐述了一种高灵敏度形状检测技术的基本原理，并提出了一个新的测试方法，可以消除坐标影响项，从而得到纯等高线条纹图。文中应用该技术，实际测量了带有几种压痕的平板表面的深度分布，分析了测量灵敏度和精度，给出了部分实验结果。
Using light interference and diffraction theory, the basic principle of a highly sensitive shape detection technique is expounded systematically. A new test method is proposed to eliminate the influence of coordinate and obtain pure contour lines. In this paper, the depth distribution of the plate surface with several indentations was measured and the measurement sensitivity and accuracy were analyzed. Some experimental results were given.